1  97   1   0  0.1779432E+02  0.1000000E-03
  CAR 
 Ti_(CH3)3_DMA away from H2N-TiN surface 
   0   0   0
   1   1
 256 256 256
 256
  0.1000000E-09
  0.6250000E-11
   0
  0.5000000E-15  0.8969130E-09  0.8969130E-09  0.2145618E-08