97   97    1    1
  0.1779432E+02  0.8969130E-09  0.8969130E-09  0.2145618E-08  0.5000000E-15
  1.000000000000000E-004
  CAR 
 Ti_(CH3)3_DMA away from H2N-TiN surface 
    671      4   2412