1  80   1   0  0.2629081E+02  0.1000000E-03
  CAR 
 CH4 + Si-CH2-Si on Si slat_V4           
   0   0   0
   1   1
 256 256 256
 256
  0.1000000E-09
  0.6250000E-11
   1
  0.5000000E-15  0.7663100E-09  0.2532620E-08  0.1083726E-08