20 20 1 1 0.2250000E+03 0.2000000E-08 0.1500000E-08 0.1500000E-08 0.5000000E-15 1.000000000000000E-004 CAR 191-->195: H radical away from DMDMOS, D 45 1 33 0.0000000E+00 0.0000000E+00 0.0000000E+00 0.1000000E+01 1 -25.199986587 1.000000 2 -24.782614259 1.000000 3 -17.267579237 1.000000 4 -16.656830342 1.000000 5 -16.549823334 1.000000 6 -16.468999519 1.000000 7 -12.717491605 1.000000 8 -11.615690473 1.000000 9 -10.897220826 1.000000 10 -10.809758932 1.000000 11 -10.583960730 1.000000 12 -10.408333227 1.000000 13 -9.796551749 1.000000 14 -9.660646108 1.000000 15 -9.287551602 1.000000 16 -8.760351437 1.000000 17 -8.686245787 1.000000 18 -8.387245560 1.000000 19 -7.688743804 1.000000 20 -7.226665954 1.000000 21 -6.974571614 1.000000 22 -6.562916948 1.000000 23 -2.949642456 0.500000 24 -0.541332288 -0.000000 25 -0.179480838 -0.000000 26 -0.156644165 -0.000000 27 0.163625144 -0.000000 28 0.245439512 -0.000000 29 0.301858650 -0.000000 30 0.409462999 -0.000000 31 0.461723741 -0.000000 32 0.578294490 -0.000000 33 0.638836867 -0.000000