20 20 1 1 0.2250000E+03 0.2000000E-08 0.1500000E-08 0.1500000E-08 0.5000000E-15 1.000000000000000E-004 CAR 191-->195: H radical away from DMDMOS, D 45 1 33 0.0000000E+00 0.0000000E+00 0.0000000E+00 0.1000000E+01 1 -25.493881734 1.000000 2 -24.871059167 1.000000 3 -17.771115883 1.000000 4 -17.338303718 1.000000 5 -16.336443504 1.000000 6 -15.844573110 1.000000 7 -13.156847482 1.000000 8 -11.831184570 1.000000 9 -11.232574358 1.000000 10 -11.173224216 1.000000 11 -10.525330229 1.000000 12 -10.471283824 1.000000 13 -10.275925511 1.000000 14 -10.020432730 1.000000 15 -9.076975701 1.000000 16 -9.048413551 1.000000 17 -8.709719640 1.000000 18 -7.839616317 1.000000 19 -7.548849195 1.000000 20 -7.215586322 1.000000 21 -6.566499099 1.000000 22 -5.640698708 1.000000 23 -3.145665523 0.500000 24 -1.938564816 -0.000000 25 -0.710514830 -0.000000 26 -0.165081159 -0.000000 27 -0.039740646 -0.000000 28 0.090070827 -0.000000 29 0.161668277 -0.000000 30 0.310898975 -0.000000 31 0.400172045 -0.000000 32 0.443708892 -0.000000 33 0.701473550 -0.000000