20 20 1 1 0.2250000E+03 0.2000000E-08 0.1500000E-08 0.1500000E-08 0.5000000E-15 1.000000000000000E-004 CAR 191-->195: H radical away from DMDMOS, D 45 1 33 0.0000000E+00 0.0000000E+00 0.0000000E+00 0.1000000E+01 1 -25.225724271 1.000000 2 -24.734034572 1.000000 3 -17.488479745 1.000000 4 -16.977743733 1.000000 5 -16.543618120 1.000000 6 -16.036330301 1.000000 7 -12.948207693 1.000000 8 -11.737363820 1.000000 9 -10.963688758 1.000000 10 -10.888505701 1.000000 11 -10.609096212 1.000000 12 -10.489278022 1.000000 13 -9.981403525 1.000000 14 -9.787933351 1.000000 15 -8.978568772 1.000000 16 -8.727319938 1.000000 17 -8.460034041 1.000000 18 -7.705060966 1.000000 19 -7.573789157 1.000000 20 -6.886419559 1.000000 21 -6.534210492 1.000000 22 -6.072539407 1.000000 23 -4.838441626 0.500000 24 -0.623409714 -0.000000 25 -0.392367607 -0.000000 26 -0.114940382 -0.000000 27 0.173463248 -0.000000 28 0.223765492 -0.000000 29 0.331311756 -0.000000 30 0.428064215 -0.000000 31 0.473479990 -0.000000 32 0.500814773 0.000000 33 0.728418072 0.000000