1  20   1   0  0.2250000E+03  0.1000000E-03
  CAR 
 191-->195: H radical away from DMDMOS, D
   0   0   0
   1   1
 256 256 256
 256
  0.1000000E-09
  0.6250000E-11
   0
  0.5000000E-15  0.2000000E-08  0.1500000E-08  0.1500000E-08