20 20 1 1 0.2250000E+03 0.2000000E-08 0.1500000E-08 0.1500000E-08 0.5000000E-15 1.000000000000000E-004 CAR 191-->195: H radical away from DMDMOS, D 45 1 33 0.0000000E+00 0.0000000E+00 0.0000000E+00 0.1000000E+01 1 -25.049932366 1.000000 2 -24.554053256 1.000000 3 -17.405020041 1.000000 4 -16.779654611 1.000000 5 -16.461447867 1.000000 6 -16.415261923 1.000000 7 -12.827549210 1.000000 8 -11.627744905 1.000000 9 -10.838518951 1.000000 10 -10.738699648 1.000000 11 -10.484945294 1.000000 12 -10.379017314 1.000000 13 -9.942664298 1.000000 14 -9.555651528 1.000000 15 -9.064152545 1.000000 16 -8.978473316 1.000000 17 -8.860037381 1.000000 18 -7.897399506 1.000000 19 -7.442307455 1.000000 20 -6.703136849 1.000000 21 -6.415511355 1.000000 22 -6.341138049 1.000000 23 -5.082624241 0.500000 24 -0.540787399 -0.000000 25 -0.178405893 -0.000000 26 -0.084301784 -0.000000 27 0.214778773 -0.000000 28 0.282421002 0.000000 29 0.330658162 0.000000 30 0.418050201 0.000000 31 0.517613899 0.000000 32 0.649944163 0.000000 33 0.738962876 0.000000