191-->195: H radical away from DMDMOS, D 1 20.000000 0.000000 0.000000 0.000000 15.000000 0.000000 0.000000 0.000000 15.000000 Si O C H 1 2 4 13 Direct configuration= 1 0.40294059 0.46443155 0.48440550 0.47869607 0.49959145 0.51978841 0.39629497 0.35950893 0.51693337 0.53978833 0.45366580 0.50143232 0.33795601 0.53581361 0.53719061 0.37106921 0.31174277 0.59143584 0.39731090 0.47234228 0.35979340 0.53306588 0.38093851 0.50410302 0.55990389 0.47144198 0.43550159 0.57625085 0.47295609 0.55275086 0.29153187 0.53317506 0.49659237 0.32462274 0.51161283 0.60474721 0.35239370 0.60575906 0.54173326 0.36706709 0.24012142 0.57329706 0.40406154 0.31595443 0.65107057 0.32087109 0.33461385 0.61236917 0.41000991 0.54176109 0.34042187 0.43064075 0.42835938 0.32111217 0.34542714 0.46114174 0.33736408 0.52879589 0.63668250 0.44315595