191-->195: H radical away from DMDMOS, D 1 20.000000 0.000000 0.000000 0.000000 15.000000 0.000000 0.000000 0.000000 15.000000 Si O C H 1 2 4 13 Direct configuration= 1 0.40021790 0.46279236 0.48284380 0.47515327 0.49773323 0.51841283 0.39126572 0.35672420 0.50964189 0.53658629 0.45409199 0.50097718 0.33605897 0.53434270 0.53470976 0.37132828 0.31327736 0.58846707 0.39614571 0.46806548 0.36031458 0.53102470 0.38123276 0.50480539 0.55662149 0.46996700 0.43443860 0.57342420 0.47529529 0.55114987 0.28769223 0.52790491 0.49888561 0.32679996 0.51424083 0.60410585 0.34864059 0.60503865 0.53400434 0.36709282 0.24122465 0.57578032 0.40726295 0.32192413 0.64331634 0.32263238 0.33629113 0.61282070 0.40771597 0.53803020 0.34303776 0.43154450 0.42486494 0.32424998 0.34515831 0.45410784 0.33708179 0.54772535 0.64785075 0.45982595