20 20 1 1 0.2250000E+03 0.2000000E-08 0.1500000E-08 0.1500000E-08 0.5000000E-15 1.000000000000000E-004 CAR 191-->195: H radical away from DMDMOS, D 45 1 33 0.0000000E+00 0.0000000E+00 0.0000000E+00 0.1000000E+01 1 -25.165689325 1.000000 2 -24.686797230 1.000000 3 -17.568733675 1.000000 4 -16.782220693 1.000000 5 -16.541121710 1.000000 6 -16.394265999 1.000000 7 -12.746984830 1.000000 8 -11.713107364 1.000000 9 -10.875794633 1.000000 10 -10.769493842 1.000000 11 -10.483411534 1.000000 12 -10.391115363 1.000000 13 -10.005427611 1.000000 14 -9.617998932 1.000000 15 -9.405907931 1.000000 16 -9.255129870 1.000000 17 -8.786921413 1.000000 18 -7.786205722 1.000000 19 -7.353306989 1.000000 20 -6.645911768 1.000000 21 -6.370812682 1.000000 22 -6.257752458 1.000005 23 -5.561149771 0.499995 24 -0.529593511 -0.000000 25 -0.089399804 0.000000 26 -0.026454923 0.000000 27 0.228924362 0.000000 28 0.329304255 0.000000 29 0.367223036 0.000000 30 0.432648354 0.000000 31 0.540879456 0.000000 32 0.723906090 0.000000 33 0.770307983 0.000000