20 20 1 1 0.2250000E+03 0.2000000E-08 0.1500000E-08 0.1500000E-08 0.5000000E-15 1.000000000000000E-004 CAR 191-->195: H radical away from DMDMOS, D 45 1 33 0.0000000E+00 0.0000000E+00 0.0000000E+00 0.1000000E+01 1 -25.099916522 1.000000 2 -24.621956403 1.000000 3 -17.462391446 1.000000 4 -16.715159158 1.000000 5 -16.463960109 1.000000 6 -16.323328800 1.000000 7 -12.643659874 1.000000 8 -11.628688122 1.000000 9 -10.828586575 1.000000 10 -10.742023742 1.000000 11 -10.438522538 1.000000 12 -10.336379837 1.000000 13 -9.886973846 1.000000 14 -9.517834956 1.000000 15 -9.312204013 1.000000 16 -9.188306603 1.000000 17 -8.706599001 1.000000 18 -7.685723398 1.000000 19 -7.339699192 1.000000 20 -6.564818939 1.000218 21 -6.357734041 1.014119 22 -6.181575429 1.015860 23 -5.988954838 0.469804 24 -0.510524911 0.000000 25 -0.081093579 0.000000 26 -0.008290817 0.000000 27 0.224071922 0.000000 28 0.346199932 0.000000 29 0.372382350 0.000000 30 0.439719457 0.000000 31 0.553434721 0.000000 32 0.712273364 0.000000 33 0.768553240 0.000000