20 20 1 1 0.2250000E+03 0.2000000E-08 0.1500000E-08 0.1500000E-08 0.5000000E-15 1.000000000000000E-004 CAR 191-->195: H radical away from DMDMOS, D 45 1 33 0.0000000E+00 0.0000000E+00 0.0000000E+00 0.1000000E+01 1 -25.037105127 1.000000 2 -24.596219601 1.000000 3 -17.431259346 1.000000 4 -16.686983082 1.000000 5 -16.459477466 1.000000 6 -16.333143858 1.000000 7 -12.588042372 1.000000 8 -11.593218445 1.000000 9 -10.798942305 1.000000 10 -10.725207287 1.000000 11 -10.455507183 1.000000 12 -10.344512521 1.000000 13 -9.882306812 1.000000 14 -9.509170546 1.000000 15 -9.298739251 1.000000 16 -9.223555670 1.000000 17 -8.718384440 1.000000 18 -7.683221115 1.000000 19 -7.381007223 1.000000 20 -6.485520705 1.004767 21 -6.428594110 1.012022 22 -6.206310134 0.977541 23 -6.056705304 0.505671 24 -0.519934694 0.000000 25 -0.085059971 0.000000 26 -0.020675738 0.000000 27 0.212772189 0.000000 28 0.354865212 0.000000 29 0.373085920 0.000000 30 0.437720748 0.000000 31 0.544449898 0.000000 32 0.693026513 0.000000 33 0.755637837 0.000000