20 20 1 1
0.2250000E+03 0.2000000E-08 0.1500000E-08 0.1500000E-08 0.5000000E-15
1.000000000000000E-004
CAR
191-->195: H radical away from DMDMOS, D
45 1 33
0.0000000E+00 0.0000000E+00 0.0000000E+00 0.1000000E+01
1 -25.037105127 1.000000
2 -24.596219601 1.000000
3 -17.431259346 1.000000
4 -16.686983082 1.000000
5 -16.459477466 1.000000
6 -16.333143858 1.000000
7 -12.588042372 1.000000
8 -11.593218445 1.000000
9 -10.798942305 1.000000
10 -10.725207287 1.000000
11 -10.455507183 1.000000
12 -10.344512521 1.000000
13 -9.882306812 1.000000
14 -9.509170546 1.000000
15 -9.298739251 1.000000
16 -9.223555670 1.000000
17 -8.718384440 1.000000
18 -7.683221115 1.000000
19 -7.381007223 1.000000
20 -6.485520705 1.004767
21 -6.428594110 1.012022
22 -6.206310134 0.977541
23 -6.056705304 0.505671
24 -0.519934694 0.000000
25 -0.085059971 0.000000
26 -0.020675738 0.000000
27 0.212772189 0.000000
28 0.354865212 0.000000
29 0.373085920 0.000000
30 0.437720748 0.000000
31 0.544449898 0.000000
32 0.693026513 0.000000
33 0.755637837 0.000000