1  66   1   0  0.2263174E+02  0.1000000E-03
  CAR 
 H2O away from surface SiC               
   0   0   0
   1   1
 256 256 256
 256
  0.1000000E-09
  0.6250000E-11
   1
  0.5000000E-15  0.9256380E-09  0.9256380E-09  0.2013024E-08